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Unable to obtain displacement due to electrostatic actuation

Posted Apr 26, 2012, 10:51 a.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Parameters, Variables, & Functions, Studies & Solvers Version 4.2a 0 Replies

Manoj Babu
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I'm having problems in getting a tilt of a suspended metal element due to application of a potential below it.. i'm not sure how to combine the electrostatics and deformation domains. i'm a beginner in comsol and the problem might be with the meshing of the element as well. any help would be great!!
also if any1 has a model of a micromirror that i could use as an example, that would be really helpful!
0 Replies Last Post Apr 26, 2012, 10:51 a.m. EDT
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Hello Manoj Babu

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