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TM Mode Microwave Plasma

Application ID: 16683


This model shows how to simulate a TM mode microwave plasma by using the Doppler broadening parameter to smooth out the resonance zone, which occurs on the contour of critical electron density.

A detailed explanation of the underlying physics of this model can be found in the blog entry "Application Note on Microwave Discharges".

This model is included as an example in the following products:

RF Module

The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.