G. R. Prakash, K. M. V. Swamy, S. Huddar, B. G. Sheeparamatti, Kirankumar B. B.
Basaveshwar Engineering College, Bagalkot, Karnataka, India
The focus of this paper is to study the effect on resonance frequency and power enhancement techniques of piezoelectric MEMS and modeling, design, and optimization of a piezoelectric generator based on a two-layer bending element(Figure 1) using COMSOL Multiphysics. An analytical relation was developed based on the shift in resonance frequency(Figure 2) caused by the addition of a thin film ...
L. Sujatha, B. Preethi
Rajalakshmi Engineering College, Chennai, India
MEMS gyroscope technology provides cost- effective method for improving directional estimation and overall accuracy in the navigation systems. This paper presents a tuning- fork gyroscope (TFG)  with a perforated proof mass. The perforated proof mass used in the design enables the reduction of the damping effect. This MEMS based gyroscope was designed using COMSOL Multiphysics 4.2a. This ...
K. Al-Shurman, H. Naseem
The Institute for Nanoscience & Engineering, University of Arkansas, Fayetteville, AR, USA
Department of Electrical Engineering, University of Arkansas, Fayetteville, AR, USA
Chemical vapor deposition is considered a promising method for synthesis of graphene films on different types of substrate utilizing transition metals such as Ni. However, synthesizing a single-layer graphene and controlling the quality of the graphene CVD film on Ni are very challenging due to the multiplicity of the CVD growth conditions. COMSOL Multiphysics® software is used to investigate ...
H. S. Shriram, T. Nimje, D. Vakharia
BITS Pilani, Rajasthan, India
Radio Frequency MEMS devices have emerged to overcome the problem of high losses associated with semiconductors at high frequencies. A tunable MEMS capacitor is a micrometre-scale electronic device whose capacitance is controlled through different actuation mechanisms which govern the moving parts. It can have electrostatic or electrothermal actuators depending on the functional complexity and ...
S. Meenatchisundaram, S. M. Kulkarni, S. Bhat
Department of Instrumentation and Control Engineering, Manipal Institute of Technology, Manipal, Karnataka, India.
Department of Mechanical Engineering, National Institute of Technology, Surathkal, Karnataka, India.
Piezoresistive pressure sensors have received much attention over the years because of low cost, simple measurement techniques, etc. There is a challenge in design with respect to appropriate positioning, shape and temperature compensation. Different models of piezoresistive pressure sensors are proposed to enhance its sensitivity in terms of output voltage. This paper aims in sensitivity ...
S. Gorelick, M. Leivo, U. Kantojärvi
VTT Technical Research Centre of Finland, Espoo, Finland
Excessive air damping can be detrimental to the performance of oscillating MEMS components. Complex systems, such as structures in pre-etched cavities or angular comb-drive scanning mirrors, typically require simulations to reliably evaluate the air damping. The simulated and experimental performance of the following systems was evaluated and compared: two types of out-of-plane cantilevers, in ...
P. Hanasi , B. G. Sheeparamatti , V. Abbigeri , N. Meti ,
 Visvesvaraya Technological University, Belagavi, Karnataka, India
Capacitor is mainly defined as two conducting plates that can hold the opposite charges on it. These plates can be used either as a sensor or an actuator. If the relative distance between the two conductors changes as result of given input, then capacitance values will change. This results in basic of capacitive or electrostatic sensing configuration. On the other hand, if a voltage or the ...
A. El Kacimi , E. Pauliac-Vaujour , J. Eymery 
 University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
 University Grenoble Alpes, CEA, Grenoble, France
We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal cone-shaped wires with hexagonal cross section are embedded within dielectric layers (parylene) in between two metal electrodes to achieve a capacitive structure. The device characteristics directly depend on growth conditions for example by tuning ...
J. Crompton, S. Yushanov, L.T. Gritter, K.C. Koppenhoefer
AltaSim Technologies, Columbus, OH, USA
The resonance conditions for surface plasmons are influenced by the type and amount of material on a surface. Full insight into surface plasmon resonance requires quantum mechanics considerations. However, it can be also described in terms of classical electromagnetic theory by considering electromagnetic wave reflection, transmission, and absorption for the multi-layer medium. The two commonly ...
Rachita Shettar, Dr. B G. Sheparamatti
Basaveshwar Engineering College, Bagalkot, Karanataka, India
In this paper modeling and simulation results of a thermal bimorph is capable of producing increased displacement for increasing temperatures are presented. Thermal bimorphs are popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Bimorph actuators consist of two materials with different coefficients of thermal expansion. The main objective of this work is to investigate the ...