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Can COMSOL simulate growth of materials in PECVD on a rotating wafer?

Posted Feb 25, 2016, 3:53 p.m. EST Plasma Physics 0 Replies

Zeba Naqvi
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Hello,
I am new to COMSOL. Currently I am learning the RF module for a part of my project. Another part of the project involves thin film growth in PECVD (Plasma Enhanced Chemical Vapor Deposition). COMSOL seems to be a powerful tool. Hence I want to see to what extent it can be useful for my projects. Can I simulate depositing thin films on rotating wafers in the PECVD chamber? Or is this too much to ask for?
Thanks
0 Replies Last Post Feb 25, 2016, 3:53 p.m. EST
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