MEMS Electrostatic Comb Actuator: A Comparison of Different Structure Designs and Materials using COMSOL 3.5a
S. Kapoor, D. Aggarwal, and A. Gujjar
University Institute of Engineering and Technology, Kurukshetra University, Kurukshetra, Haryana, India.
Electronics Science Department, University Institute of Engineering and Technology, Kurukshetra University, Haryana, India.
The micro machining technology that emerged in the late 1980’s can provide micron sized sensors and actuators. Actuators are used for the transformation of non- mechanical input energy into mechanical output energy. There are many types of micro- actuation mechanisms, most commonly used are piezoelectric, magnetic, thermal, SMA, electrochemical, electrostatic actuation. Electrostatic actuation ...
Determination of Fundamental Frequency of a Thin Rectangular Perforated Plate using COMSOL Multiphysics
S. V. N. B. Prasad, and B. Raghavendra
BITS PILANI K K BIRLA
GOA CAMPUS, India
COMSOL Multiphysics 4.0 is being used to simulate the free vibrations of a plate. The results obtained by simulation in COMSOL are in close proximity to that found by Fast Fourier Transform analyzer and analytical method. As of now the vibration analysis of thin rectangular plates with perforations in rectangular pattern has been carried out. The study of vibration analysis of thin ...
D. Maji, C. P. Ravikumar, and S. Das
School of Medical Science and Technology, Indian Institute of Technology, Kharagpur, West Bengal, India
Texas Instruments (India) Pvt. Ltd., Bangalore, India
Arterial disease, especially Coronary Artery Disease (CAD) is one of the leading causes of premature morbidity and mortality. During the flow, blood interacts with vessel wall mechanically and chemically which modulates the plaque formation in blood vessel leading to coronary artery diseases. Here we propose to simulate a MEMS based flexible flow sensor based on anemometer principle designed to ...
M. G. Sridharan, A. Prabhakar, and S. Bhattacharya
Photonics Group, Department of Electrical Engineering, Indian Institute of Technology Madras, Chennai, India
Department of Electrical Engineering, Indian Institute of Technology Madras, Chennai, India
Phase gratings are used in many applications owing to their high transmission and thus higher diffraction efficiencies. COMSOL is based on finite element modeling and is chosen for 2 reasons; firstly, because it can handle complex 2-D and 3-D geometries and secondly, it can handle the vector nature of these structures. The objective of the design is to compare the results of a commonly used ...
S. Sohail, D. Das, S. Das, and K. Biswas
Electrical Engineering Department, IIT Kharagpur
School of Medical Science and Technology, IIT Kharagpur
Digital microfluidic system based on EWOD (electrowetting-on-dielectric) technology can perform different fluidic operations on the same electrode array by simply modifying control software. One of the major challenges in EWOD device is to address each electrode individually in M x N array of electrode using simple fabrication architecture without compromising in system performance. The ...
S. L. Pinjare, V. S. Nagaraj, S. N. Savitha, S. Kesari, M. S. Sagar, and K. R. Roshan
Nitte Meenakshi Institute of Technology
The MEMS microphone is also called microphone chip or silicon microphone. The pressure sensitive diaphragm is etched directly into a silicon chip by MEMS techniques and is usually accompanied with integrated preamplifier. Most MEMS microphones are variants of the condenser microphone design. The MEMS microphone has been successfully fabricated and tested in an anechoic chamber. The microphone ...
G. Vijila, S. Vijayakumar, M. Alagappan, and A. Gupta
PSG College of Technology
Tamil Nadu, India
This paper projects a novel 3D capacitive accelerometer design to identify a severe accident and initiate airbag deployment systems. It will detect the rapid negative acceleration of the vehicle to avoid the severity of the collision. Such a device demands excellent performance in terms of sensitivity, noise immunity, linearity, bias and scale factor stability over time and environmental ...
V. Vadde, and B. Lakshmi G
In this paper, we develop and analyze a standard piezoacoustic Tonpilz-transducer model for underwater acoustics in Comsol by addressing the attendant piezoelectric and pressure acoustic multiphysics phenomena. Transducer properties that are studied and characterized are the center frequency, bandwidth, linearity, sensitivity, and noise figure. In an effort to miniaturize the transducer, a ...
B. Mishra, M. P. S. Naidu, J. Raj, and Z. C. Alex
This paper presents a novel design of a RF MEMS Switch. The switch is a capacitive type, which is actuated by an electrostatic force. The structure of the switch consists of a CPW (coplanar waveguides) transmission lines and a suspended membrane. The modelling of switch is done using COMSOL software and RF characteristics is found out by using CST software.
D. Mallick, and A. Bhattacharyya
Institute of Radio Physics and Electronics
University of Calcutta
West Bengal, India
Micromirror is a versatile MEMS device, which finds use in many application areas. In this paper, we have addressed the issues related to the design and behavioral simulation of MEMS based electro-thermal micromirror [Figure 1] for 3D motion. Two types of thermal actuation mechanism are used in the designed device. For in-plane movement poly-silicon made two-hot-arm actuatoris used. Here, the ...